SMC压力传感器 压力开关安装手册 IZS40-2320-08B

SMC压力传感器 压力开关安装手册 IZS40-2320-08B

在玻璃基板上中和静电
防止由于当基板从表面板提起时产生的静电引起的玻璃基板的破裂
在电气基板上中和静电
防止由于在切割后拾取衬底时产生的静电而导致的电衬底的破损。
反馈传感器类型系列IZS41（高速静态除电规格）
通过反馈传感器快速中和静电
注）安装了离子平衡传感器。
通过反馈传感器（可选件）读取工件的静电势并连续发射具有相反极性的离子，增加了静态中和速度。

Neutralizing static electricity on a glass substrate
Prevents the breakage of glass substrates due to the static electricity which is generated when the substrate is lifted from the surface plate
Neutralizing static electricity on an electric substrate
Prevents the breakage of electric substrates due to the static electricity which is generated when the substrates are picked up after dicing.

SMC压力传感器 压力开关安装手册 IZS40-2320-08B
Feedback sensor type Series IZS41(High speed static neutralization specification)
Rapid neutralization of static electricity by a feedback sensor
Note) An ion balance sensor is installed.
The speed of static neutralization has been increased by reading the workpiece's electrostatic potential by the feedback sensor (option) and continuously emitting ions with a reverse polarity.

IZS40-1120-06B
IZS40-1300-06B
IZS40-1600-08B
IZS40-1900-08B
IZS40-340-06B
IZS40-400-06B
IZS40-460-06B
IZS40-580-06B
IZS40-640-06B
IZS40-820-06B
IZS40-BE
IZS40-BM
IZS40-CP
IZS40-CPZ
IZS40-E3
IZS40-E4
IZS40-E5
IZS40-NC
IZS40-NJ
IZS40-NK
IZS40-NT